
Etch cluster tool
5,274 triangles
Optional LOD tiers included.
4.60 × 2.70 × 3.60 m
Download GLB of the Etch cluster tool452,424 bytes (0.45 MB)
62 models for a fictional chip fab: process tools, wafer transport and storage, the cleanroom’s floor, ceiling and walls, and the people and robots who work there, plus the campus models included in this release.

The Foundry Floor scene places 62 of the 62 models.
View the Foundry Floor scene previewEach picture is the delivered GLB, rendered under the review rig from the front right, as a plain glTF viewer draws it. The triangle count on each card is what that viewer draws; the measured list below splits it.

5,274 triangles
Optional LOD tiers included.
4.60 × 2.70 × 3.60 m
Download GLB of the Etch cluster tool452,424 bytes (0.45 MB)

5,298 triangles
Optional LOD tiers included.
4.80 × 2.70 × 3.60 m
Download GLB of the CVD/ALD cluster tool460,756 bytes (0.46 MB)

4,552 triangles
Optional LOD tiers included.
5.00 × 2.80 × 4.20 m
Download GLB of the PVD cluster tool416,676 bytes (0.42 MB)

3,044 triangles
Optional LOD tiers included.
5.00 × 3.20 × 3.60 m
Download GLB of the Single-wafer clean tool63,304 bytes (0.06 MB)

4,212 triangles
Optional LOD tiers included.
5.00 × 2.40 × 3.40 m
Download GLB of the CMP polisher127,912 bytes (0.13 MB)

2,828 triangles
Optional LOD tiers included.
4.52 × 3.80 × 2.01 m
Download GLB of the Vertical furnace98,668 bytes (0.10 MB)

5,544 triangles
Optional LOD tiers included.
4.54 × 2.80 × 8.51 m
Download GLB of the Ion implanter138,320 bytes (0.14 MB)

2,652 triangles
Optional LOD tiers included.
3.02 × 2.30 × 2.42 m
Download GLB of the Metrology inspection tool108,984 bytes (0.11 MB)

3,376 triangles
Optional LOD tiers included.
3.61 × 2.00 × 2.62 m
Download GLB of the Wafer prober/tester125,036 bytes (0.13 MB)

4,294 triangles
Optional LOD tiers included.
8.00 × 2.60 × 3.20 m
Download GLB of the Coater/developer track363,352 bytes (0.36 MB)

7,512 triangles
Optional LOD tiers included.
14.00 × 4.00 × 4.00 m
Download GLB of the EUV scanner591,660 bytes (0.59 MB)

5,364 triangles
Optional LOD tiers included.
5.50 × 3.00 × 3.20 m
Download GLB of the DUV immersion scanner408,276 bytes (0.41 MB)

1,168 triangles
Optional LOD tiers included.
0.33 × 0.34 × 0.42 m
Download GLB of the FOUP73,760 bytes (0.07 MB)

1,746 triangles
Optional LOD tiers included.
0.95 × 1.18 × 0.60 m
Download GLB of the OHT vehicle107,472 bytes (0.11 MB)

552 triangles
Optional LOD tiers included.
0.55 × 1.40 × 0.50 m
Download GLB of the Load port32,652 bytes (0.03 MB)

5,354 triangles
Optional LOD tiers included.
3.75 × 5.40 × 12.00 m
Download GLB of the Stocker299,000 bytes (0.30 MB)

328 triangles
0.07 × 0.45 × 0.07 m
Download GLB of the Signal tower13,844 bytes (0.01 MB)

400 triangles
Optional LOD tiers included.
1.20 × 2.88 × 0.95 m
Download GLB of the Under-track storage32,200 bytes (0.03 MB)

228 triangles
Optional LOD tiers included.
3.60 × 1.10 × 0.31 m
Download GLB of the OHT rail, straight15,968 bytes (0.02 MB)

668 triangles
Optional LOD tiers included.
1.95 × 1.10 × 1.95 m
Download GLB of the OHT rail, curve33,072 bytes (0.03 MB)

1,168 triangles
Optional LOD tiers included.
2.10 × 1.10 × 1.95 m
Download GLB of the OHT rail, switch61,820 bytes (0.06 MB)

384 triangles
Optional LOD tiers included.
3.60 × 0.60 × 3.60 m
Download GLB of the Raised-floor module26,336 bytes (0.03 MB)

572 triangles
Optional LOD tiers included.
3.60 × 0.41 × 3.60 m
Download GLB of the FFU ceiling module37,112 bytes (0.04 MB)

352 triangles
13.85 × 6.00 × 0.10 m
Download GLB of the Cleanroom wall kit31,156 bytes (0.03 MB)

2,464 triangles
3.60 × 6.00 × 2.40 m
Download GLB of the Subfab pump/abatement kit64,780 bytes (0.06 MB)

1,056 triangles
7.20 × 3.00 × 3.60 m
Download GLB of the Visitor gallery segment32,104 bytes (0.03 MB)

4,800 triangles
2.40 × 22.00 × 7.20 m
Download GLB of the Level section module322,096 bytes (0.32 MB)

18,375 triangles
945.60 × 74.82 × 722.60 m
Download GLB of the S1 head w794,948 bytes (0.79 MB)

18,375 triangles
945.60 × 74.82 × 722.60 m
Download GLB of the S1 head e794,948 bytes (0.79 MB)

1,146 triangles
945.00 × 70.00 × 722.00 m
Download GLB of the S1 head w far32,280 bytes (0.03 MB)

1,146 triangles
945.00 × 70.00 × 722.00 m
Download GLB of the S1 head e far32,280 bytes (0.03 MB)

1,612 triangles
150.00 × 24.50 × 300.00 m
Download GLB of the S4 canopy40,252 bytes (0.04 MB)

11,218 triangles
2772.30 × 52.00 × 524.00 m
Download GLB of the S2 hall w641,092 bytes (0.64 MB)

11,218 triangles
2772.30 × 52.00 × 524.00 m
Download GLB of the S2 hall e641,092 bytes (0.64 MB)

644 triangles
2772.00 × 52.00 × 500.00 m
Download GLB of the S2 hall w far57,480 bytes (0.06 MB)

644 triangles
2772.00 × 52.00 × 500.00 m
Download GLB of the S2 hall e far57,476 bytes (0.06 MB)

1,208 triangles
589.37 × 31.30 × 211.80 m
Download GLB of the S3 link72,040 bytes (0.07 MB)

4,500 triangles
160.00 × 12.70 × 280.00 m
Download GLB of the S5 split bridge356,080 bytes (0.36 MB)

736 triangles
160.00 × 12.60 × 280.00 m
Download GLB of the S5 split bridge far61,004 bytes (0.06 MB)

3,758 triangles
Optional LOD tiers included.
4.88 × 1.45 × 1.87 m
Download GLB of the Sedan117,780 bytes (0.12 MB)

3,752 triangles
Optional LOD tiers included.
4.27 × 1.47 × 1.81 m
Download GLB of the Hatchback118,752 bytes (0.12 MB)

3,794 triangles
Optional LOD tiers included.
4.92 × 1.76 × 1.94 m
Download GLB of the Suv120,120 bytes (0.12 MB)

2,992 triangles
Optional LOD tiers included.
5.91 × 1.95 × 2.05 m
Download GLB of the Pickup170,184 bytes (0.17 MB)

3,546 triangles
Optional LOD tiers included.
7.60 × 3.40 × 2.50 m
Download GLB of the Box truck169,728 bytes (0.17 MB)

3,684 triangles
Optional LOD tiers included.
12.21 × 3.10 × 2.67 m
Download GLB of the Transit bus194,148 bytes (0.19 MB)

800 triangles
Optional LOD tiers included.
16.00 × 20.00 × 14.72 m
Download GLB of the Tree broad l85,516 bytes (0.09 MB)

800 triangles
Optional LOD tiers included.
12.00 × 15.00 × 11.04 m
Download GLB of the Tree broad m85,532 bytes (0.09 MB)

632 triangles
Optional LOD tiers included.
8.00 × 10.00 × 7.36 m
Download GLB of the Tree broad s73,420 bytes (0.07 MB)

1,376 triangles
Optional LOD tiers included.
7.06 × 18.00 × 7.06 m
Download GLB of the Tree conifer l121,056 bytes (0.12 MB)

1,184 triangles
Optional LOD tiers included.
4.52 × 11.00 × 4.52 m
Download GLB of the Tree conifer m104,352 bytes (0.10 MB)

1,044 triangles
Optional LOD tiers included.
5.00 × 6.00 × 4.60 m
Download GLB of the Tree ornamental105,728 bytes (0.11 MB)

168 triangles
Optional LOD tiers included.
1.60 × 0.80 × 1.45 m
Download GLB of the Shrub mound19,248 bytes (0.02 MB)

32 triangles
Optional LOD tiers included.
4.00 × 1.00 × 0.80 m
Download GLB of the Hedge 4m6,996 bytes

2,808 triangles
Optional LOD tiers included.
6.85 × 3.90 × 2.53 m
Download GLB of the Truck tractor65,744 bytes (0.07 MB)

2,516 triangles
Optional LOD tiers included.
13.66 × 4.00 × 2.59 m
Download GLB of the Trailer dryvan44,968 bytes (0.04 MB)

2,804 triangles
Optional LOD tiers included.
13.66 × 3.73 × 2.57 m
Download GLB of the Trailer flatbed49,420 bytes (0.05 MB)

3,628 triangles
Optional LOD tiers included.
13.66 × 3.88 × 2.55 m
Download GLB of the Trailer tanker72,368 bytes (0.07 MB)

1,404 triangles
Optional LOD tiers included.
6.03 × 2.60 × 2.05 m
Download GLB of the Van delivery47,228 bytes (0.05 MB)

4,992 triangles
0.35 × 1.75 × 0.55 m
Download GLB of the Cleanroom technician103,868 bytes (0.10 MB)

7,468 triangles
0.40 × 1.73 × 0.62 m
Download GLB of the Humanoid work robot200,656 bytes (0.20 MB)

1,948 triangles
Optional LOD tiers included.
1.01 × 1.25 × 0.71 m
Download GLB of the AMR floor robot77,144 bytes (0.08 MB)

2,376 triangles
Optional LOD tiers included.
0.79 × 1.55 × 0.41 m
Download GLB of the Tool-front robot arm135,444 bytes (0.14 MB)
Sizes and triangle counts are read from each delivered GLB and agree with the interior asset map where it provides measurements. Campus measurements are read directly from their sealed GLBs. The table splits detailed geometry, lower tiers and scene-hidden parts. Optional MSFT_lod tiers are outside the default scene; legacy visible lod1 groups remain visible in an ordinary loader. Each card counts only what that loader actually draws.
| Model | Bounds (m) | Triangles | Materials / clips |
|---|---|---|---|
| FOUP | 0.33 × 0.34 × 0.42 | 368 detailed / 38 lod1 / 800 hidden at load | 3 / 2 |
| OHT vehicle | 0.95 × 1.18 × 0.60 | 1,746 detailed / 94 lod1 | 6 / 4 |
| Load port | 0.55 × 1.40 × 0.50 | 552 detailed / 38 lod1 | 5 / 4 |
| Stocker | 3.75 × 5.40 × 12.00 | 5,354 detailed / 240 lod1 | 7 / 1 |
| Signal tower | 0.07 × 0.45 × 0.07 | 328 detailed | 6 / 0 |
| Under-track storage | 1.20 × 2.88 × 0.95 | 400 detailed / 76 lod1 | 4 / 0 |
| OHT rail, straight | 3.60 × 1.10 × 0.31 | 228 detailed / 12 lod1 | 3 / 0 |
| OHT rail, curve | 1.95 × 1.10 × 1.95 | 668 detailed / 52 lod1 | 3 / 0 |
| OHT rail, switch | 2.10 × 1.10 × 1.95 | 1,168 detailed / 84 lod1 | 4 / 1 |
| Raised-floor module | 3.60 × 0.60 × 3.60 | 384 detailed / 10 lod1 | 3 / 0 |
| FFU ceiling module | 3.60 × 0.41 × 3.60 | 572 detailed / 6 lod1 | 4 / 0 |
| Cleanroom wall kit | 13.85 × 6.00 × 0.10 | 352 detailed | 4 / 2 |
| Etch cluster tool | 4.60 × 2.70 × 3.60 | 5,274 detailed / 316 lod1 | 7 / 3 |
| CVD/ALD cluster tool | 4.80 × 2.70 × 3.60 | 5,298 detailed / 322 lod1 | 7 / 3 |
| PVD cluster tool | 5.00 × 2.80 × 4.20 | 4,552 detailed / 478 lod1 | 8 / 3 |
| Single-wafer clean tool | 5.00 × 3.20 × 3.60 | 3,044 detailed / 156 lod1 | 8 / 1 |
| CMP polisher | 5.00 × 2.40 × 3.40 | 4,212 detailed / 264 lod1 | 8 / 3 |
| Vertical furnace | 4.52 × 3.80 × 2.01 | 2,828 detailed / 72 lod1 | 8 / 2 |
| Ion implanter | 4.54 × 2.80 × 8.51 | 5,544 detailed / 264 lod1 | 8 / 3 |
| Metrology inspection tool | 3.02 × 2.30 × 2.42 | 2,652 detailed / 108 lod1 | 7 / 1 |
| Wafer prober/tester | 3.61 × 2.00 × 2.62 | 3,376 detailed / 108 lod1 | 8 / 3 |
| Coater/developer track | 8.00 × 2.60 × 3.20 | 4,294 detailed / 146 lod1 | 7 / 1 |
| EUV scanner | 14.00 × 4.00 × 4.00 | 7,512 detailed / 216 lod1 | 7 / 3 |
| DUV immersion scanner | 5.50 × 3.00 × 3.20 | 5,364 detailed / 94 lod1 | 7 / 3 |
| Subfab pump/abatement kit | 3.60 × 6.00 × 2.40 | 2,464 detailed | 9 / 1 |
| Visitor gallery segment | 7.20 × 3.00 × 3.60 | 1,056 detailed | 6 / 0 |
| Cleanroom technician | 0.35 × 1.75 × 0.55 | 4,992 detailed | 4 / 3 |
| Humanoid work robot | 0.40 × 1.73 × 0.62 | 7,468 detailed | 4 / 5 |
| AMR floor robot | 1.01 × 1.25 × 0.71 | 1,948 detailed / 176 lod1 | 7 / 2 |
| Tool-front robot arm | 0.79 × 1.55 × 0.41 | 2,376 detailed / 60 lod1 | 8 / 4 |
| Level section module | 2.40 × 22.00 × 7.20 | 2,656 detailed / 2,144 hidden at load | 8 / 0 |
| S1 head w | 945.60 × 74.82 × 722.60 | 18,375 detailed | 10 / 0 |
| S1 head e | 945.60 × 74.82 × 722.60 | 18,375 detailed | 10 / 0 |
| S1 head w far | 945.00 × 70.00 × 722.00 | 1,146 detailed | 3 / 0 |
| S1 head e far | 945.00 × 70.00 × 722.00 | 1,146 detailed | 3 / 0 |
| S4 canopy | 150.00 × 24.50 × 300.00 | 1,612 detailed | 5 / 0 |
| S2 hall w | 2772.30 × 52.00 × 524.00 | 11,218 detailed | 11 / 0 |
| S2 hall e | 2772.30 × 52.00 × 524.00 | 11,218 detailed | 11 / 0 |
| S2 hall w far | 2772.00 × 52.00 × 500.00 | 644 detailed | 3 / 0 |
| S2 hall e far | 2772.00 × 52.00 × 500.00 | 644 detailed | 3 / 0 |
| S3 link | 589.37 × 31.30 × 211.80 | 1,208 detailed | 6 / 0 |
| S5 split bridge | 160.00 × 12.70 × 280.00 | 4,500 detailed | 5 / 0 |
| S5 split bridge far | 160.00 × 12.60 × 280.00 | 736 detailed | 4 / 0 |
| Sedan | 4.88 × 1.45 × 1.87 | 3,758 detailed / 946 lod1 | 10 / 0 |
| Hatchback | 4.27 × 1.47 × 1.81 | 3,752 detailed / 976 lod1 | 10 / 0 |
| Suv | 4.92 × 1.76 × 1.94 | 3,794 detailed / 984 lod1 | 10 / 0 |
| Pickup | 5.91 × 1.95 × 2.05 | 2,992 detailed / 824 lod1 | 10 / 0 |
| Box truck | 7.60 × 3.40 × 2.50 | 3,546 detailed / 688 lod1 | 11 / 0 |
| Transit bus | 12.21 × 3.10 × 2.67 | 3,684 detailed / 1,078 lod1 | 10 / 0 |
| Tree broad l | 16.00 × 20.00 × 14.72 | 800 detailed / 300 lod1 | 4 / 0 |
| Tree broad m | 12.00 × 15.00 × 11.04 | 800 detailed / 300 lod1 | 4 / 0 |
| Tree broad s | 8.00 × 10.00 × 7.36 | 632 detailed / 300 lod1 | 4 / 0 |
| Tree conifer l | 7.06 × 18.00 × 7.06 | 1,376 detailed / 232 lod1 | 3 / 0 |
| Tree conifer m | 4.52 × 11.00 × 4.52 | 1,184 detailed / 192 lod1 | 3 / 0 |
| Tree ornamental | 5.00 × 6.00 × 4.60 | 1,044 detailed / 336 lod1 | 4 / 0 |
| Shrub mound | 1.60 × 0.80 × 1.45 | 168 detailed / 68 lod1 | 1 / 0 |
| Hedge 4m | 4.00 × 1.00 × 0.80 | 32 detailed / 36 lod1 | 1 / 0 |
| Truck tractor | 6.85 × 3.90 × 2.53 | 2,808 detailed / 612 lod1 | 10 / 0 |
| Trailer dryvan | 13.66 × 4.00 × 2.59 | 2,516 detailed / 420 lod1 | 8 / 0 |
| Trailer flatbed | 13.66 × 3.73 × 2.57 | 2,804 detailed / 720 lod1 | 8 / 0 |
| Trailer tanker | 13.66 × 3.88 × 2.55 | 3,628 detailed / 816 lod1 | 8 / 0 |
| Van delivery | 6.03 × 2.60 × 2.05 | 1,404 detailed / 416 lod1 | 9 / 0 |
Length × height × width, in metres.
Models, textures and animations prepared for use in a scene or application.
2,137,050 bytes (2.14 MB)
Download runtime assetsModels plus Kiln source, editing metadata, materials and included revisions, so you can reopen and continue editing.
10,220,964 bytes (10.22 MB)
Download editable assetsInterior conventions come from data/assets.json; every figure on this page was read from its sealed GLB. Campus assets retain their source conventions.
The licence binds each model to its saved revision. The author inputs record the requested model, effort and harness below. Effort is not independently confirmed.
CC0-1.0 covers authored asset content only, to the extent of the owner’s rights. Kiln and any software that opens these files retain their own licenses.
The licence text comes from the sealed Foundry Floor scene pack. It names every model, its saved revision, author attribution and the SHA-256 of its GLB, and is published here unchanged.
Keep the licence text with the models. It names every model, the saved revision and the SHA-256 of the GLB it covers.
Not affiliated with or endorsed by Tesla, SpaceX, xAI, Intel, ASML or any equipment maker.